Overview

Name：customizable  EFEM/Sorter

Model：JZTR2~12

Description:

• Compatible with various wafer cassettes of SEMI standard
• Cleanliness level : ISO 1
• Wafer robot can be costomized according to requirements
• 2~12 load-port stations to select
• 6-inch, 8-inch, 12-inch wafer transport/sorting function
• Customized software and control system